María Cruz Acero Affiliation: Consejo Superior de Investigaciones Científicas. Instituto de Microelectrónica de Barcelona, IMB-CNM (España) Biography: Not available Jaume Esteve Affiliation: Consejo Superior de Investigaciones Científicas. Instituto de Microelectrónica de Barcelona, IMB-CNM (España) Biography: Not available José Antonio Plaza Affiliation: Consejo Superior de Investigaciones Científicas. Instituto de Microelectrónica de Barcelona, IMB-CNM (España) Biography: Not available Emilio Lora-Tamayo Affiliation: Consejo Superior de Investigaciones Científicas. Instituto de Microelectrónica de Barcelona, IMB-CNM (España) Biography: Not available |
María Cruz Acero; Jaume Esteve; José Antonio Plaza; Emilio Lora-Tamayo Publication year: 2010 Language: Spanish Subjects: Science and Technology Collection: Biblioteca de Ciencias |
Abstract:
The aim of this book is to explain the techniques used to manufacture siliconbased microsystems. The first part of the book gives a theoretical introduction to accelerometers in general and in particular to piezoresistive accelerometers. In the second part describes the day-to-day manufacturing process in the “Diary of the process.”
Physical Description : 157 p. : il., gráf. ; 24 cm
ISBN: 978-84-00-09162-0
eISBN: 978-84-00-09163-7
Publication: Madrid : Consejo Superior de Investigaciones Científicas, 2010
Reference CSIC: 11802
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This book was added to our online catalog on Friday 15 April, 2011.